Chemical Vapour Deposition System
Vacuum Pumps
Specification:
- It will be mainly used for CNT & Graphene growth
- High Temperature Tubular Furnace : Single Zone / Two Zone / Three Zone
- Tube Quartz :up to 1200 degree C (OR) Alumina:up to 1400 degree C
- Vacuum Pumping System
- Vacuum Valves
- Vacuum Gauges
- Temperature Controllers
- Gas mixing chamber
- Mass Flow Controllers :Inert Gases (Ar, N2 & O2) / Hydrogen / Methane /
Acetylene
